Metrology of very thin silicon epitaxial films
Author(s)
Cherkassky, Alexander (Alexander Peter), 1963-
DownloadFull printable version (15.48Mb)
Advisor
Rafael Reif.
Terms of use
Metadata
Show full item recordDescription
Thesis (Sc. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1998. Includes bibliographical references (p. 135-139).
Date issued
1998Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer SciencePublisher
Massachusetts Institute of Technology
Keywords
Electrical Engineering and Computer Science