Hot-filament chemical vapor deposition of selectively deposited diamond and silicone thin films
Author(s)
Kwan, Michael Chiu, 1969-
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Advisor
Karen K. Gleason.
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Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1997. Includes bibliographical references.
Date issued
1997Department
Massachusetts Institute of Technology. Department of Chemical EngineeringPublisher
Massachusetts Institute of Technology
Keywords
Chemical Engineering