Capacitive position-sensing and electronics for a linear electrostatic micromotor
Author(s)
Kim, Lily Y. (Lily Yvonne), 1976-
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Alternative title
Capacitive position-sensing system and electronics for a linear electrostatic micromotor
Advisor
Jeffrey H. Lang.
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Thesis (M.Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1998. Includes bibliographical references (p. 76).
Date issued
1998Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer SciencePublisher
Massachusetts Institute of Technology
Keywords
Electrical Engineering and Computer Science