Capacitive position-sensing and electronics for a linear electrostatic micromotor
Author(s)Kim, Lily Y. (Lily Yvonne), 1976-
Capacitive position-sensing system and electronics for a linear electrostatic micromotor
Jeffrey H. Lang.
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Thesis (M.Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1998.Includes bibliographical references (p. 76).
DepartmentMassachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science
Massachusetts Institute of Technology
Electrical Engineering and Computer Science