A distributed software architecture for semiconductors process design
Author(s)
Verminski, Matthew D. (Matthew David), 1974-
DownloadFull printable version (38.22Mb)
Advisor
Michael B. McIlrath, Donald E. Troxel.
Terms of use
Metadata
Show full item recordDescription
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1998. Includes bibliographical references (leaves 67-68).
Date issued
1998Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer SciencePublisher
Massachusetts Institute of Technology
Keywords
Electrical Engineering and Computer Science