Server architecture for MEMS characterization

Author(s)
Cottrell, Jared D. (Jared Desjardins), 1975-
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Alternative title
Server architecture for micro electromechanical systems characterization
Distributed data store for MEMS inspection systems
Advisor
Donald E. Troxel.
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Description
Thesis (S.B. and M.Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1998.
 
Includes bibliographical references (leaves 85-87).
 
Date issued
1998
URI
http://hdl.handle.net/1721.1/47696
Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Publisher
Massachusetts Institute of Technology
Keywords
Electrical Engineering and Computer Science
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