Server architecture for MEMS characterization
Author(s)Cottrell, Jared D. (Jared Desjardins), 1975-
Server architecture for micro electromechanical systems characterization
Distributed data store for MEMS inspection systems
Donald E. Troxel.
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Thesis (S.B. and M.Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1998.Includes bibliographical references (leaves 85-87).
DepartmentMassachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Massachusetts Institute of Technology
Electrical Engineering and Computer Science