Browsing MIT Open Access Articles by Subject "E-Beam Lithography"

Now showing items 1-1 of 1

    • Fabrication and process characterization of atom transistor chips 

      Bright, V. M.; Anderson, D. Z.; Salim, E. A.; Chuang, H. C.; Vuletic, Vladan (Institute of Electrical and Electronics Engineers, 2009-10)
      This paper describes the design and fabrication of an atom chip for atom tunneling experiments. A fabrication process was developed that uses a combination of UV-optical and Electron-Beam lithography to pattern micrometer ...