Sub-15-nm nanoimprint molds and pattern transfer

Author(s)
Morecroft, Debbie; Yang, Joel K. W.; Schuster, S.; Berggren, Karl K.; Xia, Qiangfei; ... Show more
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Creative Commons Attribution-Noncommercial-Share Alike http://creativecommons.org/licenses/by-nc-sa/3.0/
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Date issued
2009-12
URI
http://hdl.handle.net/1721.1/49496
Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science; Massachusetts Institute of Technology. Research Laboratory of Electronics
Journal
Journal of Vacuum Science and Technology B Microelectronics and Nanometer Structures
Publisher
American Institute of Physics
Citation
Morecroft, Debbie et al. “Sub-15 nm nanoimprint molds and pattern transfer.” Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 27.6 (2009): 2837.
Version: Original manuscript
ISSN
1071-1023
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