Ion beam enhanced grain growth in thin films

Author(s)
Atwater, Harry A. (Harry Albert), 1960-
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Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science.
Advisor
Henry I. Smith, Carl V. Thompson.
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Description
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1987.
 
Bibliography: leaves 213-224.
 
Date issued
1987
URI
http://hdl.handle.net/1721.1/49890
Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Publisher
Massachusetts Institute of Technology
Keywords
Electrical Engineering and Computer Science.
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