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Ion beam enhanced grain growth in thin films

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Author(s)
Atwater, Harry A. (Harry Albert), 1960-
Advisor(s)
Henry I. Smith, Carl V. Thompson.
Date Issued
1987
Publisher
Massachusetts Institute of Technology
Description
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1987.
Bibliography: leaves 213-224.
Subjects
Electrical Engineering and Computer Science.
MIT Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
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