Titanium nitride thin films by the electron shower process

Author(s)
LeClair, Patrick R. (Patrick Royce), 1976-
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Advisor
Jagadeesh S. Moodera and Caroline A. Ross.
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Description
Thesis (B.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1998.
 
Includes bibliographical references (leaves 54-56).
 
Date issued
1998
URI
http://hdl.handle.net/1721.1/50025
Department
Massachusetts Institute of Technology. Department of Materials Science and Engineering
Publisher
Massachusetts Institute of Technology
Keywords
Materials Science and Engineering
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