Sub-50nm x-ray lithography with application to a coupled quantum dot device

Author(s)
Carter, David John Donat, 1966-
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Advisor
Henry I. Smith and Terry P. Orlando.
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Description
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1998.
 
Includes bibliographical references (p. 214-231).
 
Date issued
1998
URI
http://hdl.handle.net/1721.1/50037
Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Publisher
Massachusetts Institute of Technology
Keywords
Electrical Engineering and Computer Science
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