Sub-50nm x-ray lithography with application to a coupled quantum dot device
Author(s)
Carter, David John Donat, 1966-![Thumbnail](/bitstream/handle/1721.1/50037/40335770-MIT.pdf.jpg?sequence=5&isAllowed=y)
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Advisor
Henry I. Smith and Terry P. Orlando.
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Show full item recordDescription
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1998. Includes bibliographical references (p. 214-231).
Date issued
1998Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer SciencePublisher
Massachusetts Institute of Technology
Keywords
Electrical Engineering and Computer Science