Evaluation of continuous batch processing for vertical diffusion furnaces
Author(s)
Fong, Douglas S., 1970-
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Advisor
Klavs Jensen and Roy Welsch.
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Thesis (M.S.)--Massachusetts Institute of Technology, Sloan School of Management; and, Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1998. Includes bibliographical references (p. 68-69).
Date issued
1998Department
Sloan School of Management; Massachusetts Institute of Technology. Department of Materials Science and EngineeringPublisher
Massachusetts Institute of Technology
Keywords
Sloan School of Management, Materials Science and Engineering