Design of a low-cost meso-scale, detachable fixturing system for probe-based nanomanufacturing equipment and instruments
Massachusetts Institute of Technology. Dept. of Mechanical Engineering.
Martin L. Culpepper.
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This paper introduces a low-cost, meso-scale, detachable kinematic fixturing system for use in alignment in probe-based nanomanufacturing. The fixturing system will be applied specifically to a nanopositioning system developed for the functionalization of DNA via dip pen nanolithography. A ball and groove kinematic coupling design was modified by the addition of flexural hinges to reduce the offset of friction on the coupling interface, thereby improving repeatability. A prototype fixturing assembly was fabricated and tested for repeatability in six degrees of freedom. The test results concluded that the kinematic fixturing system has a 1-[sigma] repeatability of approximately 50 nanometers and 3.5 microradians. This optimized kinematic coupling system will enable suitably repeatable, quick, and elegant assembly, thus advancing the manufacturing capabilities of dip pen nanolithography.
Thesis (S.B.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2009.Cataloged from PDF version of thesis.Includes bibliographical references (p. 41).
DepartmentMassachusetts Institute of Technology. Dept. of Mechanical Engineering.
Massachusetts Institute of Technology