Browsing RLE Progress Report, No. 138 (1995) by Subject "Scanning Electron Beam Lithography"

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Nanostructures, Technology, Research, and Applications

Smith, Henry I.; Silverman, Scott E.; Ferrera, Juan; Carter, James M.; Lim, Michael H. Y.; e.a. (Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT), 1995-01-01)