Browsing RLE Progress Report, No. 131 (1988) by Subject "Microfabrication at Linewidths of 100nm and Below"

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    • Submicron Structures Technology and Research 

      Anderson, Erik H.; Burkhardt, Martin; Carter, James M.; Chu, William; Early, Kathleen R.; e.a. (Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT), 1988-01-01)