| dc.contributor.author | Melngailis, John | en_US |
| dc.contributor.author | Smith, Henry I. | en_US |
| dc.contributor.author | Hawryluk, Andrew M. | en_US |
| dc.contributor.author | Dana, Stephane S. | en_US |
| dc.contributor.author | Bezdjian, Krikor A. | en_US |
| dc.contributor.author | Rotter, Shlomo | en_US |
| dc.contributor.author | Kwasnick, Robert F. | en_US |
| dc.contributor.author | Kastner, Marc A. | en_US |
| dc.contributor.author | Horwitz, Christopher M. | en_US |
| dc.date.accessioned | 2010-07-15T21:20:43Z | |
| dc.date.available | 2010-07-15T21:20:43Z | |
| dc.date.issued | 1981-01 | en_US |
| dc.identifier | RLE_PR_123_XIX | en_US |
| dc.identifier.uri | http://hdl.handle.net/1721.1/56806 | |
| dc.description | Contains reports on six research projects. | en_US |
| dc.description.sponsorship | Joint Services Electronics Program (Contract DAAG29-78-C-0020) | en_US |
| dc.description.sponsorship | Joint Services Electronics Program (Contract DAAG29-80-C-0104) | en_US |
| dc.description.sponsorship | M.I.T. Sloan Fund for Basic Research | en_US |
| dc.description.sponsorship | U.S. Navy - Office of Naval Research (Contract N00014-79-C-0908) | en_US |
| dc.description.sponsorship | Lawrence Livermore Laboratory (Subcontract 206-92-09) | en_US |
| dc.description.sponsorship | U.S. Department of Energy (Contract DE-ACO2-80-E10179) | en_US |
| dc.description.sponsorship | Harkness Foundation | en_US |
| dc.language.iso | en | en_US |
| dc.publisher | Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) | en_US |
| dc.relation.ispartof | Massachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1981 | en_US |
| dc.relation.ispartof | General Physics | en_US |
| dc.relation.ispartof | Submicron Structure Fabrication and Research | en_US |
| dc.relation.ispartofseries | Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 123 | en_US |
| dc.rights | Copyright (c) 2008 by the Massachusetts Institute of Technology. All rights reserved. | en_US |
| dc.subject.other | Submicron Structure Fabrication | en_US |
| dc.subject.other | Submicron Structure Research | en_US |
| dc.subject.other | Operation of Submicron Structures Laboratory | en_US |
| dc.subject.other | Development of Microfabrication Techniques | en_US |
| dc.subject.other | X-Ray Lenses | en_US |
| dc.subject.other | X-Ray Gratings | en_US |
| dc.subject.other | Graphoepitaxy | en_US |
| dc.subject.other | One-Dimensional Conduction in Silicon | en_US |
| dc.subject.other | Reactive Ion Etching | en_US |
| dc.title | Submicron Structure Fabrication and Research | en_US |
| dc.type | Technical Report | en_US |
