Submicron Structures Fabrication and Research

Author(s)
Smith, Henry I.; Hawryluk, Andrew M.; Melngailis, John J.; Schatterbug, Mark L.; Ceglio, Natale M., Jr.; ... Show more
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Copyright (c) 2008 by the Massachusetts Institute of Technology. All rights reserved.
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Description
Contains reports on twelve research projects.
Date issued
1982-01
URI
http://hdl.handle.net/1721.1/56844
Publisher
Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT)
Other identifiers
RLE_PR_124_17
Series/Report no.
Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 124
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