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Submicron Structures Fabrication and Research

dc.contributor.authorAnderson, Erik H.en_US
dc.contributor.authorHawryluk, Andrew M.en_US
dc.contributor.authorKwasnick, Robert F.en_US
dc.contributor.authorWarren, Alan C.en_US
dc.contributor.authorMelngailis, Johnen_US
dc.contributor.authorSmith, Henry I.en_US
dc.contributor.authorHorwitz, Christopher M.en_US
dc.contributor.authorKastner, Marc A.en_US
dc.contributor.authorAntoniadis, Dimitri A.en_US
dc.contributor.authorDana, Stephane S.en_US
dc.contributor.authorThompson, Carl V.en_US
dc.contributor.authorAtwater, Harry A.en_US
dc.contributor.authorKeavney, Christopher J.en_US
dc.contributor.authorFonstad, Clifton G.en_US
dc.contributor.authorSchattenburg, Mark L.en_US
dc.contributor.authorCeglio, Natale M., Jr.en_US
dc.contributor.authorCanizares, Claude R.en_US
dc.contributor.authorStein, Josephine A.en_US
dc.contributor.authorRajchman, Jan A.en_US
dc.contributor.authorPaynter, Henry M.en_US
dc.contributor.authorChen, Dong-Peien_US
dc.contributor.authorHaus, Hermann A.en_US
dc.date.accessioned2010-07-15T21:38:55Z
dc.date.available2010-07-15T21:38:55Z
dc.date.issued1983-01en_US
dc.identifierRLE_PR_125_18en_US
dc.identifier.urihttp://hdl.handle.net/1721.1/56874
dc.descriptionContains reports on thirteen research projects.en_US
dc.description.sponsorshipJoint Services Electronics Program (Contract DAAG29-83-K-0003)en_US
dc.description.sponsorshipU.S. Navy - Office of Naval Research (Contract N00014-79-C-0908)en_US
dc.description.sponsorshipNational Science Foundation (Grant ECS82-05701)en_US
dc.description.sponsorshipI.B.M. (PO No. 90305-QPSA-559)en_US
dc.description.sponsorshipU.S. Department of Energy (Contract DE-AC02-82-ER13019)en_US
dc.description.sponsorshipLawrence Livermore Laboratory (Contract 2069209)en_US
dc.language.isoenen_US
dc.publisherResearch Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT)en_US
dc.relation.ispartofMassachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1983en_US
dc.relation.ispartofSubmicron Structures Fabrication and Researchen_US
dc.relation.ispartofseriesMassachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 125en_US
dc.rightsCopyright (c) 2008 by the Massachusetts Institute of Technology. All rights reserved.en_US
dc.subject.otherSubmicron Structures Fabricationen_US
dc.subject.otherSubmicron Structures Researchen_US
dc.subject.otherSubmicron Structures Laben_US
dc.subject.otherMicrostructure Fabrication at Linewidths of 0.1 μm and Belowen_US
dc.subject.otherReactive Sputter Etching Studiesen_US
dc.subject.otherElectronic Conduction in Ultra-Narrow Silicon Inversion Layersen_US
dc.subject.otherCorrugated-Gate MOS Structuresen_US
dc.subject.otherGraphoepitaxy of Si Materialsen_US
dc.subject.otherGraphoepitaxy of Model Materialsen_US
dc.subject.otherZone Melting Recrystallization of Si for Solar Cellsen_US
dc.subject.otherZone Melting Recrystallization of InSb and InPen_US
dc.subject.otherSubmicrometer-Period Gold Transmission Gratings for X-Ray Spectroscopyen_US
dc.subject.otherZone Plates for X-Ray Spectroscopyen_US
dc.subject.otherSubmicrometer-Period Gold Transmission Gratings for X-Ray Microscopyen_US
dc.subject.otherZone Plates for X-Ray Microscopyen_US
dc.subject.otherHigh Dispersion, High Efficiency Transmission Gratings for Astrophysical X-Ray Spectroscopyen_US
dc.subject.otherSwitchable Zero-Order Diffraction Gratings as Light Valvesen_US
dc.subject.otherFilters Based on Conversion of Surface Acoustic Waves to Bulk Plate Modes in Gratingsen_US
dc.subject.otherCollaborative Projectsen_US
dc.titleSubmicron Structures Fabrication and Researchen_US
dc.typeTechnical Reporten_US


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