| dc.contributor.author | Melngailis, John | en_US |
| dc.contributor.author | Musil, Christian R. | en_US |
| dc.contributor.author | Stevens, Eugene H. | en_US |
| dc.contributor.author | Utlaut, Mark | en_US |
| dc.contributor.author | Geis, Michael W. | en_US |
| dc.contributor.author | Mountain, Robert W. | en_US |
| dc.contributor.author | Lezec, Henri J. | en_US |
| dc.contributor.author | Kellog, Edwin | en_US |
| dc.date.accessioned | 2010-07-15T21:58:50Z | |
| dc.date.available | 2010-07-15T21:58:50Z | |
| dc.date.issued | 1985-01 | en_US |
| dc.identifier | RLE_PR_127_03 | en_US |
| dc.identifier.uri | http://hdl.handle.net/1721.1/56945 | |
| dc.description | Contains reports on three research projects. | en_US |
| dc.description.sponsorship | Joint Services Electronics Program (Contract DAAG29-83-K-0003) | en_US |
| dc.description.sponsorship | Charles Stark Draper Laboratory (Contract DL-H-225270) | en_US |
| dc.description.sponsorship | International Business Machines, Inc. (Contract 3260) | en_US |
| dc.language.iso | en | en_US |
| dc.publisher | Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) | en_US |
| dc.relation.ispartof | Massachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1985 | en_US |
| dc.relation.ispartof | Focused Ion Beam Fabrication | en_US |
| dc.relation.ispartofseries | Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 127 | en_US |
| dc.rights | Copyright (c) 2008 by the Massachusetts Institute of Technology. All rights reserved. | en_US |
| dc.subject.other | Focused Ion Beam Fabrication | en_US |
| dc.subject.other | Focused Ion Beam System | en_US |
| dc.subject.other | Connections Through Focused Ion Beam Milled Vias | en_US |
| dc.subject.other | Mask Repair | en_US |
| dc.subject.other | Ion Assisted Deposition | en_US |
| dc.title | Focused Ion Beam Fabrication | en_US |
| dc.type | Technical Report | en_US |
