| dc.contributor.author | Musil, Christian | en_US |
| dc.contributor.author | Melngailis, John | en_US |
| dc.contributor.author | Stevens, Eugene H. | en_US |
| dc.contributor.author | Bartelt, John | en_US |
| dc.contributor.author | Utlaut, Mark | en_US |
| dc.contributor.author | Post, Richard | en_US |
| dc.contributor.author | Kellog, Edwin | en_US |
| dc.contributor.author | Geiss, Michael W. | en_US |
| dc.contributor.author | Mountain, Robert W. | en_US |
| dc.contributor.author | Shedd, Gordon M. | en_US |
| dc.contributor.author | Lezec, Henri J. | en_US |
| dc.contributor.author | Dubner, Andrew D. | en_US |
| dc.contributor.author | Jacobs, Jarvis B. | en_US |
| dc.contributor.author | Lowther, Rex E. | en_US |
| dc.contributor.author | Mahoney, Leonard J. | en_US |
| dc.contributor.author | Antoniadis, Dimitri A. | en_US |
| dc.date.accessioned | 2010-07-15T22:10:06Z | |
| dc.date.available | 2010-07-15T22:10:06Z | |
| dc.date.issued | 1986-01 | en_US |
| dc.identifier | RLE_PR_128_03 | en_US |
| dc.identifier.uri | http://hdl.handle.net/1721.1/56969 | |
| dc.description | Contains summary of research program and reports on four research projects. | en_US |
| dc.description.sponsorship | Charles Stark Draper Laboratory (Contract DL-H-225270) | en_US |
| dc.description.sponsorship | Hughes Research Laboratories | en_US |
| dc.description.sponsorship | International Business Machines, Inc. (Contract 456614) | en_US |
| dc.description.sponsorship | Nippon Telegraph and Telephone, Inc. | en_US |
| dc.description.sponsorship | U.S. Navy - Office of Naval Research (Contract N00014-84-K-0073) | en_US |
| dc.description.sponsorship | U.S. Department of Defense (Contract MDA903-85-C-0215) | en_US |
| dc.description.sponsorship | Hitachi Central Research Laboratory | en_US |
| dc.language.iso | en | en_US |
| dc.publisher | Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) | en_US |
| dc.relation.ispartof | Massachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1986 | en_US |
| dc.relation.ispartof | Focused Ion Beam Fabrication | en_US |
| dc.relation.ispartofseries | Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 128 | en_US |
| dc.rights | Copyright (c) 2008 by the Massachusetts Institute of Technology. All rights reserved. | en_US |
| dc.subject.other | Focused Ion Beam Fabrication | en_US |
| dc.subject.other | Focused Ion Beam Microsurgery of Integrated Circuits | en_US |
| dc.subject.other | Ion Beam Assisted Deposition | en_US |
| dc.subject.other | Fabrication of Graded Channel FET's in GaAs | en_US |
| dc.subject.other | Fabrication of Graded Channel FET's in Si | en_US |
| dc.subject.other | Measurement of Beam Profile | en_US |
| dc.title | Focused Ion Beam Fabrication | en_US |
| dc.type | Technical Report | en_US |
