Submicron Structures Technology and Research

Author(s)
Smith, Henry I.; Burkhardt, Martin; Carter, James M.; Chu, William; Early, Kathleen R.; ... Show more
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Copyright (c) 2008 by the Massachusetts Institute of Technology. All rights reserved.
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Description
Contains table of contents for Part I, table of contents for Section 1 and reports on thirteen research projects.
Date issued
1989-01-01
URI
http://hdl.handle.net/1721.1/57116
Publisher
Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT)
Other identifiers
RLE_PR_132_01_01s_01
Series/Report no.
Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 132
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