| dc.contributor.author | Troxel, Donald E. | en_US |
| dc.contributor.author | Stamatopolous, Miltiadis A. | en_US |
| dc.contributor.author | Gershwin, Stanley B. | en_US |
| dc.contributor.author | Love, Nicole S. | en_US |
| dc.contributor.author | Moyne, William P. | en_US |
| dc.contributor.author | Kao, James T. | en_US |
| dc.contributor.author | Kwon, Jimmy Y. | en_US |
| dc.contributor.author | Bonvik, Asbjoern M. | en_US |
| dc.contributor.author | Carney, John C. | en_US |
| dc.contributor.author | Fischer, Gregory T. | en_US |
| dc.contributor.author | Lohman, Thomas J. | en_US |
| dc.contributor.author | McIlrath, Michael B. | en_US |
| dc.contributor.author | Boning, Duane S. | en_US |
| dc.contributor.author | Unver, Evren R. | en_US |
| dc.contributor.author | Antoniadis, Dimitri A. | en_US |
| dc.contributor.author | Gabbay, Lynn D. | en_US |
| dc.contributor.author | Jacobs, Jarvis B. | en_US |
| dc.contributor.author | Rahman, Nadir E. | en_US |
| dc.contributor.author | Tso, Kit Yan | en_US |
| dc.date.accessioned | 2010-07-16T20:33:12Z | |
| dc.date.available | 2010-07-16T20:33:12Z | |
| dc.date.issued | 1994-01-01 to 1994-12-31 | en_US |
| dc.identifier | RLE_PR_137_03_01s_02 | en_US |
| dc.identifier.uri | http://hdl.handle.net/1721.1/57288 | |
| dc.description | Contains an introduction, reports on thirteen research projects and a list of publications. | en_US |
| dc.description.sponsorship | Advanced Research Projects Agency | en_US |
| dc.description.sponsorship | U.S. Navy Contract N00174-93-K-0035 | en_US |
| dc.language.iso | en | en_US |
| dc.publisher | Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) | en_US |
| dc.relation.ispartof | Massachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1 - December 31, 1994 | en_US |
| dc.relation.ispartof | Systems and Signals | en_US |
| dc.relation.ispartof | Computer-Aided Design | en_US |
| dc.relation.ispartof | Computer-Integrated Fabrication System Structure | en_US |
| dc.relation.ispartofseries | Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 137 | en_US |
| dc.rights | Copyright (c) 2008 by the Massachusetts Institute of Technology. All rights reserved. | en_US |
| dc.subject.other | Computer-Integrated Fabrication System Structure | en_US |
| dc.subject.other | CAFE Applications | en_US |
| dc.subject.other | Organization of Data for Factory Design | en_US |
| dc.subject.other | Organization of Data for Factory Control | en_US |
| dc.subject.other | Organization of Algorithms for Factory Design | en_US |
| dc.subject.other | Organization of Algorithms for Factory Control | en_US |
| dc.subject.other | Statistical Process Control Charts for the Computer-Aided Fabrication Environment | en_US |
| dc.subject.other | Interfaces of Run-by-Run Control | en_US |
| dc.subject.other | Implementations of Run-by-Run Control | en_US |
| dc.subject.other | Integration of Run-by-Run Control | en_US |
| dc.subject.other | Hardware Setup for a Remote Microscope | en_US |
| dc.subject.other | First-Order Model for Remote Fabrication | en_US |
| dc.subject.other | Estimating the Lead Time Distribution of Priority Lots in a Semiconductor Factory | en_US |
| dc.subject.other | Factory Display Software | en_US |
| dc.subject.other | Message Passing Tools for Software Integration | en_US |
| dc.subject.other | CAFE at MIT Lincoln Laboratory | en_US |
| dc.subject.other | Error Handling Within CAFE | en_US |
| dc.subject.other | Semiconductor Manufacturing Process Flow Representation | en_US |
| dc.subject.other | Computer-Aided Technology Design | en_US |
| dc.title | Computer-Integrated Fabrication System Structure | en_US |
| dc.type | Technical Report | en_US |
