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dc.contributor.authorFreeman, Dennis M.en_US
dc.contributor.authorTroxel, Donald E.en_US
dc.contributor.authorMcIlrath, Michael B.en_US
dc.contributor.authorAranyosi, Alexander J.en_US
dc.contributor.authorDavis, Charles Quentinen_US
dc.contributor.authorGordon, Michael J.en_US
dc.contributor.authorHong, Stanley S.en_US
dc.contributor.authorHuang, Richard Y.en_US
dc.contributor.authorJohnson, Laura K.en_US
dc.contributor.authorKaru, Zoher Z.en_US
dc.contributor.authorMermelstein, Michael S.en_US
dc.contributor.authorReich, Benjamin D.en_US
dc.contributor.authorPederson, Erik J.en_US
dc.contributor.authorCottrell, Jared D.en_US
dc.date.accessioned2010-07-17T01:37:19Z
dc.date.available2010-07-17T01:37:19Z
dc.date.issued1997-01-01 to 1997-12-31en_US
dc.identifierRLE_PR_140_03_03s_01en_US
dc.identifier.urihttp://hdl.handle.net/1721.1/57401
dc.descriptionContains table of contents for Section 3 and reports on five research projects.en_US
dc.description.sponsorshipCharles S. Draper Laboratory Contract DL-H-496015en_US
dc.description.sponsorshipDefense Advanced Research Project Agency Grant F30602-97-2-0106en_US
dc.description.sponsorshipW.M. Keck Foundation Career Development Professorshipen_US
dc.description.sponsorshipAlfred P. Sloan Foundation Instrumentation Granten_US
dc.language.isoenen_US
dc.publisherResearch Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT)en_US
dc.relation.ispartofMassachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1 - December 31, 1997en_US
dc.relation.ispartofSystems and Signalsen_US
dc.relation.ispartofMicroelectromechanical Systemsen_US
dc.relation.ispartofComputer Microvision for Microelectromechanical Systemsen_US
dc.relation.ispartofseriesMassachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 140en_US
dc.rightsCopyright (c) 2008 by the Massachusetts Institute of Technology. All rights reserved.en_US
dc.subject.otherComputer Microvision for Microelectromechanical Systemsen_US
dc.subject.otherCalibration of Fatigue Test Structuresen_US
dc.subject.otherModal Analysis of the Draper Gyroscopeen_US
dc.subject.otherSpeckle Heterodyne Microscopyen_US
dc.subject.otherTest Studies for Microelectromechanical Systemsen_US
dc.titleComputer Microvision for Microelectromechanical Systemsen_US
dc.typeTechnical Reporten_US


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