dc.contributor.author | Freeman, Dennis M. | en_US |
dc.contributor.author | Troxel, Donald E. | en_US |
dc.contributor.author | McIlrath, Michael B. | en_US |
dc.contributor.author | Aranyosi, Alexander J. | en_US |
dc.contributor.author | Davis, Charles Quentin | en_US |
dc.contributor.author | Gordon, Michael J. | en_US |
dc.contributor.author | Hong, Stanley S. | en_US |
dc.contributor.author | Huang, Richard Y. | en_US |
dc.contributor.author | Johnson, Laura K. | en_US |
dc.contributor.author | Karu, Zoher Z. | en_US |
dc.contributor.author | Mermelstein, Michael S. | en_US |
dc.contributor.author | Reich, Benjamin D. | en_US |
dc.contributor.author | Pederson, Erik J. | en_US |
dc.contributor.author | Cottrell, Jared D. | en_US |
dc.date.accessioned | 2010-07-17T01:37:19Z | |
dc.date.available | 2010-07-17T01:37:19Z | |
dc.date.issued | 1997-01-01 to 1997-12-31 | en_US |
dc.identifier | RLE_PR_140_03_03s_01 | en_US |
dc.identifier.uri | http://hdl.handle.net/1721.1/57401 | |
dc.description | Contains table of contents for Section 3 and reports on five research projects. | en_US |
dc.description.sponsorship | Charles S. Draper Laboratory Contract DL-H-496015 | en_US |
dc.description.sponsorship | Defense Advanced Research Project Agency Grant F30602-97-2-0106 | en_US |
dc.description.sponsorship | W.M. Keck Foundation Career Development Professorship | en_US |
dc.description.sponsorship | Alfred P. Sloan Foundation Instrumentation Grant | en_US |
dc.language.iso | en | en_US |
dc.publisher | Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) | en_US |
dc.relation.ispartof | Massachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1 - December 31, 1997 | en_US |
dc.relation.ispartof | Systems and Signals | en_US |
dc.relation.ispartof | Microelectromechanical Systems | en_US |
dc.relation.ispartof | Computer Microvision for Microelectromechanical Systems | en_US |
dc.relation.ispartofseries | Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 140 | en_US |
dc.rights | Copyright (c) 2008 by the Massachusetts Institute of Technology. All rights reserved. | en_US |
dc.subject.other | Computer Microvision for Microelectromechanical Systems | en_US |
dc.subject.other | Calibration of Fatigue Test Structures | en_US |
dc.subject.other | Modal Analysis of the Draper Gyroscope | en_US |
dc.subject.other | Speckle Heterodyne Microscopy | en_US |
dc.subject.other | Test Studies for Microelectromechanical Systems | en_US |
dc.title | Computer Microvision for Microelectromechanical Systems | en_US |
dc.type | Technical Report | en_US |