| dc.contributor.author | Smith, Henry I. | en_US |
| dc.contributor.author | Mondol, Mark K. | en_US |
| dc.contributor.author | Goodberlet, James G. | en_US |
| dc.contributor.author | Bernshteyn, Alex | en_US |
| dc.contributor.author | Ferrera, Juan | en_US |
| dc.contributor.author | Carter, David J. | en_US |
| dc.contributor.author | Schweizer, Mark R. | en_US |
| dc.contributor.author | Daley, James M. | en_US |
| dc.contributor.author | Lim, Michael H. Y. | en_US |
| dc.contributor.author | Moon, Euclid E. | en_US |
| dc.contributor.author | Djohmehri, Ihsan | en_US |
| dc.contributor.author | Savas, Timothy A. | en_US |
| dc.contributor.author | Carter, James M. | en_US |
| dc.contributor.author | Murphy, Edward R. | en_US |
| dc.contributor.author | Everett, Patrick N. | en_US |
| dc.contributor.author | Lee, Jawoong | en_US |
| dc.contributor.author | Farhoud, Maya S. | en_US |
| dc.contributor.author | Fleming, Robert C., Jr. | en_US |
| dc.contributor.author | Schattenburg, Mark L. | en_US |
| dc.contributor.author | Ross, Caroline A. | en_US |
| dc.contributor.author | Youcef-Toumi, Kamal | en_US |
| dc.contributor.author | Bae, Jungmok M. | en_US |
| dc.contributor.author | Hwang, M. | en_US |
| dc.contributor.author | Jackson, Keith M. | en_US |
| dc.contributor.author | Lee, Zachary K. | en_US |
| dc.contributor.author | Antoniadis, Dimitri A. | en_US |
| dc.contributor.author | Lochtefeld, Anthony | en_US |
| dc.contributor.author | Sokolinski, Ilia | en_US |
| dc.contributor.author | Chung, James E. | en_US |
| dc.contributor.author | Meinhold, Mitchell W. | en_US |
| dc.contributor.author | Berman, David B. | en_US |
| dc.contributor.author | Ashoori, Raymond C. | en_US |
| dc.contributor.author | Fan, Shanhui | en_US |
| dc.contributor.author | Foresi, James S. | en_US |
| dc.contributor.author | Steinmeyer, Günter | en_US |
| dc.contributor.author | Thoen, Erik R. | en_US |
| dc.contributor.author | Villeneuve, Pierre R. | en_US |
| dc.contributor.author | Ippen, Erich P. | en_US |
| dc.contributor.author | Joannopoulos, John D. | en_US |
| dc.contributor.author | Kimerling, Lionel C. | en_US |
| dc.contributor.author | Qi, Minghao | en_US |
| dc.contributor.author | Damask, Jay N. | en_US |
| dc.contributor.author | Khan, Mohammed Jalal | en_US |
| dc.contributor.author | Koontz, Elisabeth M. | en_US |
| dc.contributor.author | Murphy, Thomas E. | en_US |
| dc.contributor.author | Kolodziejski, Leslie A. | en_US |
| dc.contributor.author | Haus, Hermann A. | en_US |
| dc.contributor.author | van Beek, Joost | en_US |
| dc.contributor.author | Hindle, P. | en_US |
| dc.contributor.author | Porter, Jeannie M. | en_US |
| dc.contributor.author | Prentiss, Jane D. | en_US |
| dc.contributor.author | Sisson, Robert D. | en_US |
| dc.contributor.author | Canizares, Claude R. | en_US |
| dc.contributor.author | Franke, Andrea E. | en_US |
| dc.contributor.author | Pflug, David | en_US |
| dc.contributor.author | Akinwande, Akintunde I. | en_US |
| dc.contributor.author | Bozler, Carl | en_US |
| dc.contributor.author | Rana, Farhan | en_US |
| dc.contributor.author | Marley, Elisabeth A. | en_US |
| dc.contributor.author | Ram, Rajeev J. | en_US |
| dc.date.accessioned | 2010-07-17T01:40:09Z | |
| dc.date.available | 2010-07-17T01:40:09Z | |
| dc.date.issued | 1997-01-01 to 1997-12-31 | en_US |
| dc.identifier | RLE_PR_140_01_02s_04 | en_US |
| dc.identifier.uri | http://hdl.handle.net/1721.1/57421 | |
| dc.description | Contains reports on twenty-four research projects and a list of publications. | en_US |
| dc.description.sponsorship | Joint Services Electronics Program Grant DAAHO4-95-1-0038 | en_US |
| dc.description.sponsorship | Defense Advanced Research Projects Agency/Semiconductor Research Corporation SA1645-25508PG | en_US |
| dc.description.sponsorship | U.S. Army Research Office Grant DAAHO4-95-1-0564 | en_US |
| dc.description.sponsorship | Defense Advanced Research Projects Agency/U.S. Navy - Naval Air Systems Command Contract N00019-95-K-0131 | en_US |
| dc.description.sponsorship | Suss Advanced Lithography P. O. 51668 | en_US |
| dc.description.sponsorship | National Aeronautics and Space Administration Contract NAS8-38249 | en_US |
| dc.description.sponsorship | National Aeronautics and Space Administration Grant NAGW-2003 | en_US |
| dc.description.sponsorship | Defense Advanced Research Projects Agency/U.S. Army Research Office Grant DAAHO4-951-0564 | en_US |
| dc.description.sponsorship | 3M Corporation | en_US |
| dc.description.sponsorship | Defense Advanced Research Projects Agency/U.S. Navy - Office of Naval Research Contract N66001-97-1-8909 | en_US |
| dc.description.sponsorship | National Science Foundation Graduate Fellowship | en_US |
| dc.description.sponsorship | U.S. Army Research Office Contract DAAHO4-94-G-0377 | en_US |
| dc.description.sponsorship | National Science Foundation Contract DMR-940034 | en_US |
| dc.description.sponsorship | National Science Foundation Grant DMR 94-00334 | en_US |
| dc.description.sponsorship | Defense Advanced Research Projects Agency/U.S. Air Force - Office of Scientific Research Contract F49620-96-1-0126 | en_US |
| dc.description.sponsorship | Harvard-Smithsonian Astrophysical Observatory Contract SV630304 | en_US |
| dc.description.sponsorship | National Aeronautics and Space Administration Grant NAG5-5105 | en_US |
| dc.description.sponsorship | Los Alamos National Laboratory Contract E57800017-9G | en_US |
| dc.description.sponsorship | Southwest Research Institute Contract 83832 | en_US |
| dc.description.sponsorship | MIT Lincoln Laboratory Advanced Concepts Program | en_US |
| dc.description.sponsorship | MIT Lincoln Laboratory Contract BX-6558 | en_US |
| dc.language.iso | en | en_US |
| dc.publisher | Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) | en_US |
| dc.relation.ispartof | Massachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1 - December 31, 1997 | en_US |
| dc.relation.ispartof | Solid State Physics, Electronics and Optics | en_US |
| dc.relation.ispartof | Quantum-Effect Devices | en_US |
| dc.relation.ispartof | Nanostructures Technology, Research, and Applications | en_US |
| dc.relation.ispartofseries | Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 140 | en_US |
| dc.rights | Copyright (c) 2008 by the Massachusetts Institute of Technology. All rights reserved. | en_US |
| dc.subject.other | Nanostructures Technology | en_US |
| dc.subject.other | Nanostructures Research | en_US |
| dc.subject.other | Nanostructures Applications | en_US |
| dc.subject.other | Scanning-Electron-Beam Lithography | en_US |
| dc.subject.other | Spatial-Phase-Locked Electron-Beam Lithography | en_US |
| dc.subject.other | X-Ray Nanolithography | en_US |
| dc.subject.other | Zone-Plate Based X-Ray Lithography | en_US |
| dc.subject.other | Deep-UV Projection Lithography | en_US |
| dc.subject.other | Improved Mask Technology for X-Ray Lithography | en_US |
| dc.subject.other | Robust, High-Precision Mask Alignment and X-ray Exposure System | en_US |
| dc.subject.other | Interferometric Lithography | en_US |
| dc.subject.other | Sub-100 nm Metrology Using Interferometrically Produced Fiducial Grids | en_US |
| dc.subject.other | Arrays of Nanomagnets for High-Density Information Storage | en_US |
| dc.subject.other | Design of Single-Mask 50 nm MOSFETs | en_US |
| dc.subject.other | Fabrication of Single-Mask 50 nm MOSFETs | en_US |
| dc.subject.other | CMOS Technology for 25 nm Channel Length | en_US |
| dc.subject.other | Fabrication of T-gate Devices Using X-ray Lithography | en_US |
| dc.subject.other | Single-Electron Transistor Research | en_US |
| dc.subject.other | One-Dimensional Photonic-Band-Gap Devices in SOI Waveguides | en_US |
| dc.subject.other | Three-dimensional Photonic Bandgap Structures | en_US |
| dc.subject.other | Design of an Integrated Channel-Dropping Filter in InP | en_US |
| dc.subject.other | Fabrication of an Integrated Channel-Dropping Filter in InP | en_US |
| dc.subject.other | Fabrication of an Integrated Optical Grating-Based Matched Filter for Fiber-Optic Communications | en_US |
| dc.subject.other | High-Dispersion, High-Efficiency Transmission Gratings for Astrophysical X-ray Spectroscopy | en_US |
| dc.subject.other | Super-smooth X-ray Reflection Gratings | en_US |
| dc.subject.other | Transmission Gratings as UV-blocking Filters for Neutral Atom Imaging | en_US |
| dc.subject.other | Submicrometer-Period Transmission Gratings for X-ray Spectroscopy | en_US |
| dc.subject.other | Submicrometer-Period Transmission Gratings for X-ray Interferometry | en_US |
| dc.subject.other | Submicrometer-Period Transmission Gratings for Atom-Beam Spectroscopy | en_US |
| dc.subject.other | Submicrometer-Period Transmission Gratings for Atom-Beam Interferometry | en_US |
| dc.subject.other | Field-Emitter-Array Flat-Panel Displays for Head-Mounted Applications | en_US |
| dc.subject.other | Development of High-Speed Distributed Feedback (DFB) | en_US |
| dc.subject.other | Development of Distributed-Bragg Semiconductor Lasers | en_US |
| dc.title | Nanostructures Technology, Research, and Applications | en_US |
| dc.type | Technical Report | en_US |
