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Piezoelectric Micromotors for Microrobots

Author(s)
Flynn, Anita M.; Tavrow, Lee S.; Bart, Stephen F.; Brooks, Rodney A.
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Abstract
By combining new robot control systems with piezoelectric motors and micromechanics, we propose creating micromechanical systems which are small, cheap and completely autonomous. We have fabricated small - a few millimeters in diameter - piezoelectric motors using ferroelectric thin films and consisting of two pieces: a stator and a rotor. The stationary stator includes a piezoelectric film in which we induce bending in the form of a traveling wave. Anything which sits atop the stator is propelled by the wave. A small glass lens placed upon the stator becomes the spinning rotor. Using thin films of PZT on silicon nitride memebranes, various types of actuator structures have been fabricated.
Date issued
1991-02-01
URI
http://hdl.handle.net/1721.1/5989
Other identifiers
AIM-1269
Series/Report no.
AIM-1269
Keywords
micromotors, microrobots, piezoelectric, traveling wavesmotors, ultrasonic motors, gnat robots

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