Development of a high-speed profilometer for manufacturing inspection

Author(s)
Ljubicic, Dean M.; Anthony, Brian
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Abstract
Optical digital-imaging techniques offer a fast, high-resolution, and wide-range metrology capability for measuring semi-transparent and transparent polymer-based devices during manufacture. This work presents novel instrumentation for in-process statistical control and metrology capable of measuring a complete macroscale part (~25 mm) down to its microscale features (~50 μm). The high speed 2.5D profilometer has generated contour plots with 0.4 μm lateral and 1 μm vertical resolution. The instrument has an estimated data rate of 8 million 3D data points per second, approximately 270 times faster than conventional white light interferometry.
Date issued
2010-08
URI
http://hdl.handle.net/1721.1/60936
Department
Massachusetts Institute of Technology. Department of Mechanical Engineering; Massachusetts Institute of Technology. Laboratory for Manufacturing and Productivity
Journal
Proceedings of SPIE--the International Society for Optical Engineering
Publisher
SPIE
Citation
Dean M. Ljubicic and Brian Anthony, "Development of a high-speed profilometer for manufacturing inspection", Proc. SPIE 7767, 776705 (2010); doi:10.1117/12.860166 © 2010 COPYRIGHT SPIE
Version: Final published version
ISSN
0277-786X
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