MEMS spatial light modulator for holographic displays

Abstract

This thesis presents new approaches to building holographic displays. The approaches use a diffractive spatial light modulator (SLM) built using microelectromechanical system (MEMS) technology. Several related MEMS SLMs are reviewed. In particular, the capabilities of Silicon Light Machines' Grating Light Valve (GLV T) and the Polychromator by Honeywell, Sandia, and MIT are examined because they are both diffractive SLMs. A holographic display design is presented that is based on a diffractive SLM that combines the spatial resolution of the GLV with the addressability of the Polychromator. The holographic display system design and the MEMS fabrication process are described. Although the MEMS device was not fully fabricated, much of the process was developed. The successful process steps and suggestions for process improvements are laid out. Finally an improved MEMS SLM process and a scalable MEMS holographic display are proposed.