High-index-contrast electromechanical optical switches

Abstract

System developers are looking to replace protocol-dependent, bandwidth-limited optical networks with intelligent optically-transparent integrated photonic networks. Several electromechanical optical switches are explored with the intent of being utilized as optical switching elements in transparent, integrated photonic networks. The electromechanical optical switches are based on high-index-contrast waveguide optics that is integrated with electrostatic parallel plate actuators on submicron scales. High-index-contrast waveguides are attractive due to their reduced bending radius and low in-plane scattering and optical loss. These qualities of high-index-contrast waveguides make them uniquely suited for low-cost, large-scale integration. The parallel plate actuators are used to control the waveguide light switching by mechanically establishing and terminating light pathways on time scales well below 100s of microseconds. Investigations of light pathway coupling schemes and parallel plate actuator configurations led to the development of several device structures that are categorized in three distinct device generations. Design premiums were placed upon device footprint minimization, polarization independence, high extinction ratios, and operational robustness.