MIT Libraries homeMIT Libraries logoDSpace@MIT

MIT
View Item 
  • DSpace@MIT Home
  • MIT Libraries
  • MIT Theses
  • Theses - Dept. of Electrical Engineering and Computer Sciences
  • Electrical Engineering and Computer Sciences - Ph.D. / Sc.D.
  • View Item
  • DSpace@MIT Home
  • MIT Libraries
  • MIT Theses
  • Theses - Dept. of Electrical Engineering and Computer Sciences
  • Electrical Engineering and Computer Sciences - Ph.D. / Sc.D.
  • View Item
JavaScript is disabled for your browser. Some features of this site may not work without it.

A study of micromachined displacement pumps for vacuum generation

Author(s)
Zhou, Hui, Ph. D. Massachusetts Institute of Technology
Thumbnail
DownloadFull printable version (6.078Mb)
Other Contributors
Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science.
Advisor
Martin A. Schmidt.
Terms of use
M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582
Metadata
Show full item record
Abstract
Micromachined vacuum pumps are one of the key components in miniature systems for chemical and biological analysis. Miniature sensors and analyzers are normally operated at the pressure range lower than a few millitorr. We are developing a micromachined vacuum pump that is comprised of a mechanical rough pump integrated with micromachined ion-pumps. The rough pump generates a low vacuum of tens of torr from atmospheric pressure for the ion-pumps to initialize. Field ionization and electron impact ionization pumps that connect to the rough pumps continue to pump from the low vacuum of tens of torr to high vacuum of millitorr or even microtorr. The focus of this thesis work is on the development of the micromachined rough pump. A micromachined displacement pump concept is adopted for the development of the chip scale vacuum rough pump. The micro displacement pump is designed with the aid of analytical and numerical modeling. The rough pump is fabricated by deep-reactive ion etching and other standard micromachining techniques. Systematic study into operation of this class of pumps allows us to now report on a pump that achieves 164 torr absolute pressure, which is to our knowledge the lowest measured pressure in a micromachined vacuum pump operated from atmospheric pressure. This performance improvement is significant in that it enables a base pressure of less than 35 torr for a two-stage design, which allows integration with the ion pump, thus leading to realization of miniature chemical and biological analyzers. More importantly, the understanding of the micromachined displacement pumps for vacuum generation has been greatly improved and a universal model has been developed, which is very powerful to describe and predict the micromachined displacement pump behavior for vacuum generation.
Description
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2011.
 
This electronic version was submitted by the student author. The certified thesis is available in the Institute Archives and Special Collections.
 
Cataloged from student submitted PDF version of thesis.
 
Includes bibliographical references (p. 159-162).
 
Date issued
2011
URI
http://hdl.handle.net/1721.1/68179
Department
Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science.
Publisher
Massachusetts Institute of Technology
Keywords
Electrical Engineering and Computer Science.

Collections
  • Electrical Engineering and Computer Sciences - Ph.D. / Sc.D.
  • Electrical Engineering and Computer Sciences - Ph.D. / Sc.D.

Browse

All of DSpaceCommunities & CollectionsBy Issue DateAuthorsTitlesSubjectsThis CollectionBy Issue DateAuthorsTitlesSubjects

My Account

Login

Statistics

OA StatisticsStatistics by CountryStatistics by Department
MIT Libraries homeMIT Libraries logo

Find us on

Twitter Facebook Instagram YouTube RSS

MIT Libraries navigation

SearchHours & locationsBorrow & requestResearch supportAbout us
PrivacyPermissionsAccessibility
MIT
Massachusetts Institute of Technology
Content created by the MIT Libraries, CC BY-NC unless otherwise noted. Notify us about copyright concerns.