Development of chipscale chalcogenide glass based infrared chemical sensors
Author(s)Hu, Juejun; Musgraves, J. David; Carlie, Nathan; Zdyrko, Bogdan; Luzinov, Igor; Richardson, Kathleen; Agrawal, Anuradha Murthy; Kimerling, Lionel C.; ... Show more Show less
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In this paper, we review the design, processing, and characterization of novel planar infrared chemical sensors. Chalcogenide glasses are identified as the material of choice for sensing given their wide infrared transparency as well as almost unlimited capacity for composition alloying and property tailoring. Three generations of on-chip spectroscopic chemical sensor devices we have developed: waveguide evanescent sensors, micro-disk cavity-enhanced sensors and micro-cavity photothermal sensors are discussed.
DepartmentMassachusetts Institute of Technology. Department of Materials Science and Engineering; Massachusetts Institute of Technology. Microphotonics Center
Quantum Sensing and Nanophotonic Devices VIII
Society of Photo-optical Instrumentation Engineers
Juejun Hu, J. David Musgraves, Nathan Carlie, Bogdan Zdyrko, Igor Luzinov, Anu Agarwal, Kathleen Richardson and Lionel Kimerling, "Development of chipscale chalcogenide glass based infrared chemical sensors", in Quantum Sensing and Nanophotonic Devices VIII, (Proc. of SPIE 7945, 79452C (2011). © 2011 SPIE.
Final published version