Oblique Angle Deposition of Germanium Film on Silicon Substrate
Author(s)Chew, Han Guan; Choi, Wee Kiong; Chim, Wai Kin; Fitzgerald, Eugene A.
The effect of flux angle, substrate temperature and deposition rate on obliquely deposited germanium (Ge) films has been investigated. By carrying out deposition with the vapor flux inclined at 87° to the substrate normal at substrate temperatures of 250°C or 300°C, it may be possible to obtain isolated Ge nanowires. The Ge nanowires are crystalline as shown by Raman Spectroscopy.
Advanced Materials for Micro- and Nano-Systems (AMMNS);
Oblique angle deposition, Germanium nanowires