dc.contributor.author | Tang, Y. | |
dc.contributor.author | Loh, Han Tong | |
dc.contributor.author | Fuh, J.-Y.-H. | |
dc.contributor.author | Lu, L. | |
dc.contributor.author | Wong, Yeow Sheong | |
dc.contributor.author | Thian, S. C. H. | |
dc.date.accessioned | 2004-12-14T19:55:08Z | |
dc.date.available | 2004-12-14T19:55:08Z | |
dc.date.issued | 2005-01 | |
dc.identifier.uri | http://hdl.handle.net/1721.1/7453 | |
dc.description.abstract | A novel process based on the principle of layered photolithography has been proposed and tested for making real three-dimensional micro-structures. An experimental setup was designed and built for doing experiments on this micro-fabrication process. An ultraviolet (UV) excimer laser at the wavelength of 248 nm was used as the light source and a single piece of photo-mask carrying a series of two dimensional (2D) patterns sliced from a three dimensional (3D) micro-part was employed for the photolithography process. The experiments were conducted on the solidification of liquid photopolymer from single layer to multiple layers. The single-layer photolithography experiments showed that certain photopolymers could be applied for the 3D micro-fabrication, and solid layers with sharp shapes could be formed from the liquid polymer identified. By using a unique alignment technique, multiple layers of photolithography was successfully realized for a micro-gear with features at 60 microns. Electroforming was also conducted for converting the photopolymer master to a metal cavity of the micro-gear, which proved that the process is feasible for micro-molding. | en |
dc.description.sponsorship | Singapore-MIT Alliance (SMA) | en |
dc.format.extent | 223014 bytes | |
dc.format.mimetype | application/pdf | |
dc.language.iso | en | |
dc.relation.ispartofseries | Innovation in Manufacturing Systems and Technology (IMST); | |
dc.subject | Electroforming | en |
dc.subject | Micro-fabrication | en |
dc.subject | Micro-molding | en |
dc.subject | Photolithography | en |
dc.title | Micro-layered-photolithography for Micro-Fabrication and Micro-Molding | en |
dc.type | Article | en |