Browsing MIT Theses by Author "Qi, Minghao, 1973-"

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Micro-fabrication of 3-D Si/air and Si/SiO₂/air PBG structures

Qi, Minghao, 1973- (Massachusetts Institute of Technology, 1998)
Three-dimensional nanofabrication of photonic crystals and polarization splitters and rotators

Qi, Minghao, 1973- (Massachusetts Institute of Technology, 2005)

One of the most critical challenges in nanoscale science and engineering is to make functional 3D nanodevices with high-accuracy. While considerable progress has been made in the "bottom-up" approach, the lithographic ...