Now showing items 1-1 of 1

    • Finite element model of thermoelastic damping in MEMS 

      Gorman, John P. (John Patrick), 1973- (Massachusetts Institute of Technology, 2002)
      Damping in MEMS resonators was studied experimentally and numerically. Quality factor measurements were performed on Draper gyroscopes made from boron doped silicon wafers with varying amount of germanium (0%, 2%, 23%, 30% ...