Control of a MEMS fast steering mirror for laser applications
Author(s)Lane, Joseph Kerivan
Control of a microelectromechanical systems fast steering mirror for laser applications
Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science.
James K. Roberge and Gary Shaw.
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A control system for a MEMS fast steering mirror is designed and implemented to accurately steer a laser beam. This document contains a characterization of important mirror characteristics and the full analysis of an analog control system designed to maximize the performance of the mirror. A full analysis of the performance of the design, including bandwidth, stability, accuracy, power consumption, and system size and weight, is provided along with optical scan expansion designs. Finally, future possible improvements to the design are discussed.
Thesis (M. Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2012.Cataloged from PDF version of thesis.Includes bibliographical references (p. 78-79).
DepartmentMassachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science.
Massachusetts Institute of Technology
Electrical Engineering and Computer Science.