Now showing items 161-162 of 162
DC magnetron reactive sputtering of low stress AlN piezoelectric thin films for MEMS application
(Massachusetts Institute of Technology, 1999)
Microelectromechanical systems (MEMS) often incorporate piezoelectric thin films to actuate and detect motion of mechanical structures. Aluminum nitride is advantageous for MEMS use because it can be deposited at low ...
Microelectromechanical (MEMS) structures for thin film property measurement
(Massachusetts Institute of Technology, 1998)
Microelectromechanical systems (MEMS) are becoming the bases for an important industry with potential applications in numerous fields. The current study explores the use of MEMS-based, electrically-actuated structures to ...