Chemical and physical methods of the templated direction of block copolymers
Author(s)Nicaise, Samuel M. (Samuel Mospens)
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science.
Karl K. Berggren.
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This thesis discusses the investigation of various aspects of templated self-assembly of block copolymer (BCP) thin films for nanofeature fabrication. Two chapters outline the research of a combined physical and chemical templating method with two BCPs. The method was not effective in templating poly(styrene-block-methyl methacrylate) (PS-b-PMMA) BCP because of limited template wettability. The method effectively templated poly(octofluro pentamethacrylate-block-hydroxystyrene) (OFPMA-b-HSM) BCP to fabricate orthogonally-directed lamellar microdomains and nanohole-mesh arrays. Chapter 4 discusses the achievement of a mean overlay accuracy of 52 nm and 0' for two electron-beam-based lithographic features as a result of an investigated overlay process. Lastly, the thesis reports the fabrication of a wide-range of nanofeatures - from two-dimensional and three dimensional nanoholes arrays to elliptical and cylindrical meshes - by the sacrificial-post templating method with poly(styreneblock- dimethylsiloxane) (PS-b-PDMS) BCP.
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2012.Cataloged from PDF version of thesis.Includes bibliographical references.
DepartmentMassachusetts Institute of Technology. Department of Electrical Engineering and Computer Science.
Massachusetts Institute of Technology
Electrical Engineering and Computer Science.