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dc.contributor.advisorHenry I. Smith.en_US
dc.contributor.authorBernshteyn, Aleksandr, 1975-en_US
dc.date.accessioned2013-08-22T18:48:23Z
dc.date.available2013-08-22T18:48:23Z
dc.date.copyright1999en_US
dc.date.issued1999en_US
dc.identifier.urihttp://hdl.handle.net/1721.1/80053
dc.descriptionThesis (S.B. and M.Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1999.en_US
dc.descriptionIncludes bibliographical references (p. 47-49).en_US
dc.description.statementofresponsibilityby Aleksandr Bernshteyn.en_US
dc.format.extent49 p.en_US
dc.language.isoengen_US
dc.publisherMassachusetts Institute of Technologyen_US
dc.rightsM.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission.en_US
dc.rights.urihttp://dspace.mit.edu/handle/1721.1/7582en_US
dc.subjectElectrical Engineering and Computer Scienceen_US
dc.titleHigh speed electron-beam dose modulation by electrostatic quadra-deflectionen_US
dc.title.alternativeHigh-speed electron-beam dose modulation by electrostatic quadruple electrostatic deflectionen_US
dc.typeThesisen_US
dc.description.degreeS.B.and M.Eng.en_US
dc.contributor.departmentMassachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
dc.identifier.oclc43442998en_US


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