| dc.contributor.advisor | Rafael Reif. | en_US |
| dc.contributor.author | Fan, Andy, 1976- | en_US |
| dc.date.accessioned | 2013-08-22T18:50:30Z | |
| dc.date.available | 2013-08-22T18:50:30Z | |
| dc.date.copyright | 1999 | en_US |
| dc.date.issued | 1999 | en_US |
| dc.identifier.uri | http://hdl.handle.net/1721.1/80085 | |
| dc.description | Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1999. | en_US |
| dc.description | Includes bibliographical references (p. 65-67). | en_US |
| dc.description.statementofresponsibility | by Andy Fan. | en_US |
| dc.format.extent | 67 p. | en_US |
| dc.language.iso | eng | en_US |
| dc.publisher | Massachusetts Institute of Technology | en_US |
| dc.rights | M.I.T. theses are protected by
copyright. They may be viewed from this source for any purpose, but
reproduction or distribution in any format is prohibited without written
permission. See provided URL for inquiries about permission. | en_US |
| dc.rights.uri | http://dspace.mit.edu/handle/1721.1/7582 | en_US |
| dc.subject | Electrical Engineering and Computer Science | en_US |
| dc.title | An evaluation of three dimensional integration technology | en_US |
| dc.title.alternative | Evaluation of 3D integration technology | en_US |
| dc.type | Thesis | en_US |
| dc.description.degree | S.M. | en_US |
| dc.contributor.department | Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science | |
| dc.identifier.oclc | 43498297 | en_US |
