| dc.contributor.advisor | Herbert H. Swain. | en_US |
| dc.contributor.author | Lane, Jennifer M. (Jennifer Marie), 1977- | en_US |
| dc.contributor.other | Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science. | en_US |
| dc.date.accessioned | 2013-08-22T19:01:22Z | |
| dc.date.available | 2013-08-22T19:01:22Z | |
| dc.date.copyright | 1999 | en_US |
| dc.date.issued | 1999 | en_US |
| dc.identifier.uri | http://hdl.handle.net/1721.1/80245 | |
| dc.description | Thesis (M.Eng. and S.B.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1999. | en_US |
| dc.description | Includes bibliographical references (leaves 91-94). | en_US |
| dc.description.statementofresponsibility | by Jennifer M. Lane. | en_US |
| dc.format.extent | 110 leaves | en_US |
| dc.language.iso | eng | en_US |
| dc.publisher | Massachusetts Institute of Technology | en_US |
| dc.rights | M.I.T. theses are protected by
copyright. They may be viewed from this source for any purpose, but
reproduction or distribution in any format is prohibited without written
permission. See provided URL for inquiries about permission. | en_US |
| dc.rights.uri | http://dspace.mit.edu/handle/1721.1/7582 | en_US |
| dc.subject | Electrical Engineering and Computer Science. | en_US |
| dc.title | A fundamental study of feature evolution during high density plasma etching | en_US |
| dc.title.alternative | Feature evolution during high density plasma etching | en_US |
| dc.type | Thesis | en_US |
| dc.description.degree | M.Eng.and S.B. | en_US |
| dc.contributor.department | Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science | |
| dc.identifier.oclc | 48206466 | en_US |
