Distortion analysis on an improved mask technology for X-ray lithography

Author(s)
Pipe, Kevin P. (Kevin Patrick), 1976-
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Advisor
Henry I. Smith.
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Description
Thesis (S.B. and M.Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1999.
 
Includes bibliographical references (leaves 90-91).
 
Date issued
1999
URI
http://hdl.handle.net/1721.1/80560
Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Publisher
Massachusetts Institute of Technology
Keywords
Electrical Engineering and Computer Science
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