The environmental impact of copper CMP

Author(s)
Maag, Benoît, 1964-
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Alternative title
Environmental impact of copper Chemical Mechanical Polishing
Other Contributors
Massachusetts Institute of Technology. Department of Civil and Environmental Engineering.
Advisor
Duane Boning.
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Description
Thesis (M.Eng.)--Massachusetts Institute of Technology, Dept. of Civil and Environmental Engineering, 2000.
 
Includes bibliographical references (leaves 88-90).
 
Date issued
2000
URI
http://hdl.handle.net/1721.1/80960
Department
Massachusetts Institute of Technology. Department of Civil and Environmental Engineering
Publisher
Massachusetts Institute of Technology
Keywords
Civil and Environmental Engineering.
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