The environmental impact of copper CMP
Author(s)
Maag, Benoît, 1964-
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Alternative title
Environmental impact of copper Chemical Mechanical Polishing
Other Contributors
Massachusetts Institute of Technology. Department of Civil and Environmental Engineering.
Advisor
Duane Boning.
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Metadata
Show full item recordDescription
Thesis (M.Eng.)--Massachusetts Institute of Technology, Dept. of Civil and Environmental Engineering, 2000. Includes bibliographical references (leaves 88-90).
Date issued
2000Department
Massachusetts Institute of Technology. Department of Civil and Environmental EngineeringPublisher
Massachusetts Institute of Technology
Keywords
Civil and Environmental Engineering.