Development of a precision hot embossing machine with in-process sensing

Abstract

Microuidic technologies show great promise in simplifying and speeding biological, medical, and fluidic tasks, but transitioning these technologies from a laboratory environment to a production environment has proven difficult. This work focuses on hot embossing as a process suitable to produce these devices. In this work, a precision micro-embossing machine capable of maintaining precise setpoints in force and temperature input as well as displaying highly linear, repeatable motion and force application is developed and characterized. Additionally, this equipment is then outfitted with additional sensors that allow for three measurements relevant to process physics and product quality to be captured: initial substrate geometry; substrate bulk deformation; and glass transition temperature of the material. These measurements can be captured in-process without modifying the production cycle. The end goal is to incorporate this precision micro-embossing machine into a micro-factory cell and to implement closed-loop cycle-to-cycle process control.