Assessing the viability of various metallic microfabrication techniques

Author(s)
Hastings, Abel Z., 1973-
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Massachusetts Institute of Technology. Dept. of Materials Science and Engineering.
Advisor
Merton C. Flemings.
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Abstract
An investigation was completed to assess the viability of a group of metallic microfabrication techniques aimed at the production of microelectromechanical systems (MEMS) This undertaking was done to show which methods hold the most promise for the near future. The methods investigated include LIGA, micromilling, jet molding, three dimensional printing, microcasting, micro-injection molding, metal injection molding, Microforming, and microextrusion. This study presents a technique overview, assembly issues, an applications survey, basic cost modeling and a survey of the relevant intellectual property.
Description
Thesis (M.Eng.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 2002.
 
Includes bibliographical references (p. 85-89).
 
Date issued
2002
URI
http://hdl.handle.net/1721.1/8460
Department
Massachusetts Institute of Technology. Department of Materials Science and Engineering
Publisher
Massachusetts Institute of Technology
Keywords
Materials Science and Engineering.
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