Assessing the viability of various metallic microfabrication techniques
Author(s)Hastings, Abel Z., 1973-
Massachusetts Institute of Technology. Dept. of Materials Science and Engineering.
Merton C. Flemings.
MetadataShow full item record
An investigation was completed to assess the viability of a group of metallic microfabrication techniques aimed at the production of microelectromechanical systems (MEMS) This undertaking was done to show which methods hold the most promise for the near future. The methods investigated include LIGA, micromilling, jet molding, three dimensional printing, microcasting, micro-injection molding, metal injection molding, Microforming, and microextrusion. This study presents a technique overview, assembly issues, an applications survey, basic cost modeling and a survey of the relevant intellectual property.
Thesis (M.Eng.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 2002.Includes bibliographical references (p. 85-89).
DepartmentMassachusetts Institute of Technology. Dept. of Materials Science and Engineering.
Massachusetts Institute of Technology
Materials Science and Engineering.