Electrically tunable terahertz quantum cascade lasers

Abstract

In this thesis, microelectromechanical systems (MEMS) assisted electrically tunable terahertz quantum cascade lasers (THz QCLs) are designed and demonstrated. Two MEMS tuner devices are proposed to achieve electrically tunable THz QCLs. One is the electrostatic comb drive actuated tuner design and the other one is a two-stage flexure design that is actuated by an external piezo nano-positioning actuator. The MEMS tuner devices are all fabricated using standard foundry process SOIMUMPs from MEMSCAP Inc. with some additional in-house post-processings. First order distributed-feedback (DFB) THz wire QCLs with robust mode selectors are designed and fabricated at the MIT Microsystems Technology Laboratories (MTL) using processes developed at our group. By integrating the MEMS tuner chips with the THz QCL chips, broadband electrically tunable THz QCLs are successfully demonstrated. This thesis work provides an important step towards realizing turn-key tunable THz coherent sources for a variety of applications such as THz spectroscopy and THz coherent tomography.