Electromigration behavior and reliability of bamboo Al(Cu) interconnects for integrated circuits

Author(s)
Srikar, V. T. (Vengallatore Thattai), 1972-
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Advisor
Carl V. Thompson.
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Description
Thesis (Ph.D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1999.
 
Includes bibliographical references (leaves 103-108).
 
Date issued
1999
URI
http://hdl.handle.net/1721.1/85249
Department
Massachusetts Institute of Technology. Department of Materials Science and Engineering
Publisher
Massachusetts Institute of Technology
Keywords
Materials Science and Engineering
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