The interactions of molecular fluorine and xenon difluoride with silicon

Author(s)
Tate, Matthew Richard, 1972-
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Massachusetts Institute of Technology. Department of Chemistry.
Advisor
Sylvia T. Ceyer.
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Description
Thesis (Ph.D.)--Massachusetts Institute of Technology, Dept. of Chemistry, 1999.
 
Includes bibliographical references.
 
Date issued
1999
URI
http://hdl.handle.net/1721.1/85293
Department
Massachusetts Institute of Technology. Department of Chemistry
Publisher
Massachusetts Institute of Technology
Keywords
Chemistry.
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