Post oxide etching cleaning process using integrated ashing and HF vapor process

Author(s)
Kwon, Ohseung, 1969-
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Massachusetts Institute of Technology. Department of Materials Science and Engineering.
Advisor
Herbert H. Swain.
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Description
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1999.
 
Includes bibliographical references (leaves 50-51).
 
Date issued
1999
URI
http://hdl.handle.net/1721.1/85324
Department
Massachusetts Institute of Technology. Department of Materials Science and Engineering
Publisher
Massachusetts Institute of Technology
Keywords
Materials Science and Engineering.
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