Screening experiment for a polysilicon gate etch chamber
Author(s)
Levis, Kim-Marie, 1976-![Thumbnail](/bitstream/handle/1721.1/85325/43936916-MIT.pdf.jpg?sequence=5&isAllowed=y)
DownloadFull printable version (4.465Mb)
Other Contributors
Massachusetts Institute of Technology. Department of Materials Science and Engineering.
Advisor
Gerald Benard and Klavs F. Jensen.
Terms of use
Metadata
Show full item recordDescription
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1999. Includes bibliographical references (leaf 53).
Date issued
1999Department
Massachusetts Institute of Technology. Department of Materials Science and EngineeringPublisher
Massachusetts Institute of Technology
Keywords
Materials Science and Engineering.