Screening experiment for a polysilicon gate etch chamber

Author(s)
Levis, Kim-Marie, 1976-
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Massachusetts Institute of Technology. Department of Materials Science and Engineering.
Advisor
Gerald Benard and Klavs F. Jensen.
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Description
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1999.
 
Includes bibliographical references (leaf 53).
 
Date issued
1999
URI
http://hdl.handle.net/1721.1/85325
Department
Massachusetts Institute of Technology. Department of Materials Science and Engineering
Publisher
Massachusetts Institute of Technology
Keywords
Materials Science and Engineering.
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