A nano-stepping robotic instrumentation platform

Abstract

The development of an Autonomous Nano-stepping Tool (ANT) system is presented. Each ANT is a small, tripodal, robotic instrument capable of untethered precision motion within a quasi-three-dimensional workspace of arbitrary size. The project aimed to address limitations of conventional benchtop micro/nanoscale measurement and manipulation systems by offering a low-cost, scalable alternative with comparable performance and extended functionality and flexibility. The design, fabrication, and evaluation the various electrical, mechanical, and software subsystems are discussed. Device prototypes are introduced along with a platform-agnostic interface for remote monitoring and control. The device step size and its frequency dependence are examined. A novel, high-resolution capacitive probe concept is detailed and characterized as an example of an inexpensive, low-power, sensor technology with which an ANT may be equipped to perform scanning probe microscopy. Several positioning schemes are discussed, including a distributed vision-based approach which utilized a custom cross-correlation processor.