Enhancing MEMS design using statistical process information

Author(s)
Moyne, William P. (William Patrick)
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Alternative title
Enhancing micro electro-mechanical systems design using statistical process information
Other Contributors
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science.
Advisor
Duane S. Boning and Donald E. Troxel.
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M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582
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Description
Thesis (Ph.D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2000.
 
Includes bibliographical references (p. 145-148).
 
Date issued
2000
URI
http://hdl.handle.net/1721.1/85725
Department
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
Publisher
Massachusetts Institute of Technology
Keywords
Electrical Engineering and Computer Science.
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